What is Autodoping?

autodoping. dopant atoms evaporating from semiconductor surface region during high temperature treatments can be reintroduced into semiconductor causing undesired variations in dopant concentration at the surface; highly undesired effect; of particular concnern in high-temperature epitaxial deposition processes. …

What is Autodoping in growth process?

A side effect of the epitaxial process is autodoping. This occurs during the deposition by two methods. One is out-diffusion from the substrate. The high temperatures allow the higher concentration of dopants in the substrate to diffuse into the epitaxial layer.

What is epitaxy in VLSI?

Epitaxy refers to the deposition of an overlayer on a crystalline substrate, where the overlayer is in registry with the substrate. The overlayer is called an epitaxial film or epitaxial layer.

What is epitaxy in IC fabrication?

Epitaxy is the process of the controlled growth of a crystalline doped layer of silicon on a single crystal substrate. Metallization and interconnections. After all semiconductor fabrication steps of a device or of an integrated circuit are. completed, it becomes necessary to provide metallic interconnections for the.

What is known as epitaxy?

The term epitaxy comes from the Greek roots epi, meaning “above”, and taxis, meaning “in ordered manner”. Epitaxy refers to the deposition of an overlayer on a crystalline substrate, where the overlayer is in registry with the substrate. The overlayer is called an epitaxial film or epitaxial layer.

What is epitaxy method?

epitaxy, the process of growing a crystal of a particular orientation on top of another crystal, where the orientation is determined by the underlying crystal. The creation of various layers in semiconductor wafers, such as those used in integrated circuits, is a typical application for the process.

What is epitaxy and its types?

Epitaxy refers to a type of crystal growth or material deposition in which new crystalline layers are formed with one or more well-defined orientations with respect to the crystalline seed layer. The term epitaxy comes from the Greek roots epi (ἐπί), meaning “above”, and taxis (τάξις), meaning “an ordered manner”.